http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I629721-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-245 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-26 |
| filingDate | 2014-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f126171accb204582f8e0d1c0a8d2cdf http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fbed42c249a7603ed024e4711f5aad1b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fc0130885384c1e6eddfd1daa5d249b3 |
| publicationDate | 2018-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I629721-B |
| titleOfInvention | Chemical mechanical honing pad with a material composition that promotes control adjustment |
| abstract | Embodiments of the present invention generally provide methods and apparatus for abrading articles or microstructured polishing pads to promote uniform adjustment when exposed to laser energy. In one embodiment, a polishing pad comprising a first material and a second material composition is provided, the first material being more reactive toward laser energy than the second material. In another embodiment, a method of texturing a composite abrasive pad is provided. The method includes directing laser energy onto the surface of the polishing pad to provide a large ablation rate in the first material having a higher laser absorptivity and a smaller ablation rate in the second material having a lower laser absorptivity. In order to provide a micro-textured surface consistent with the microstructure of the composite polishing pad. |
| priorityDate | 2013-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.