http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I628159-B

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C2603-74
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-33
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-39
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-28
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-327
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-162
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-168
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D213-61
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C323-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C321-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-58
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D239-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C25-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D213-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D239-74
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C211-63
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-29
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-19
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L101-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-00
filingDate 2016-10-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2018-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5778d74bdb48cd3668e715e1786b0a14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_802d961e267cab2ff5c3f5972b78b315
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e64ad8645410a694fdc772366a2226d9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bd7a44df2258d64351335afdebbe5007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fc9a29ba90b9f3443d76acddd56968c0
publicationDate 2018-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-I628159-B
titleOfInvention Thermal acid generator and photoresist pattern trimming composition and method
abstract An ionic thermal acid generator is provided that includes anions and cations of an aromatic sulfonic acid including one or more fluorinated alcohol groups. In addition, a photoresist pattern trimming composition including an ionic thermal acid generator, a matrix polymer, and a solvent, and a method for trimming a photoresist pattern using the trimming composition are provided. The thermal acid generator, composition, and method are particularly suitable for manufacturing a semiconductor device.
priorityDate 2015-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201341981-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201439679-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014065544-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6756179-B2
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419538684
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID402
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456499112
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411581203
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID118253622
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422057939
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419502284
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577642
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420317239
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13529
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448908333
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15901
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID68157
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID136181
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10885
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11729320
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419573701
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416161498
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419538106
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID67794
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8129
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422482195
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15260619
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14144898
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11269
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410932322
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7351
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10976
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457673758
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458397365
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID297
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420319959
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457280508
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420549279
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414867529
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420462479
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426127296
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458397310
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419571676
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559261
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419539361
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415771200
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID129073001
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1100
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419488561
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66984
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3820533
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11233
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410553083
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID455590858
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6038
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3283
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID519935
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419526596
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8141
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559581
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23665772
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12178
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7910
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419529376
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10989
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419510528
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22386
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457623688
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21791174
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9553
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID67831
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20083
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421655474
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31260
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419513864
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419558969
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11515
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419562219
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419528183
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID432798064
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520428
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559397
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11519
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450862104
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11520
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11940
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11594
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12217
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61018
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419521664
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21923858
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420462446
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414880537
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123334
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419526902
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420348536
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425868015
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID638097
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9641
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID88454
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID121437187
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID80714
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452309750
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448915018
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421348734
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6999002
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512386
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID120269
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419522744
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512387
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87126141
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415831639
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID138202
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559526
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426005046
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7983
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID409432810
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415738202
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454973655
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11529
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458394891
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448674543
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5333
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415738123
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2774972
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458392901
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520553
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16670
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2736748
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419481172
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458427722
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512377
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414878861

Total number of triples: 184.