| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d68514a32e3a53b7a0c77aabb87304b8 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C2601-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C381-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C25-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C381-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-17 |
| filingDate |
2011-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cc756fc8ae9dcf7c25e46484bb182261
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bd44c07c00c8a702946b05a50295f63b |
| publicationDate |
2018-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I627157-B |
| titleOfInvention |
Sulfonic acid derivative and photoacid generator |
| abstract |
The present invention provides a photoacid generator for a photoresist material and a sulfonic acid derivative suitable as a photo-generating acid, which does not generate foreign matter and which produces an acid having sufficient acid strength.nn n n The sulfonic acid derivative is characterized by a sulfonic acid derivative represented by the following formula (1), RCOOCH 2 CH 2 CFHCF 2 SO 3 - M + (1) (in the formula (1), R represents a substitution or no A linear, branched or cyclic hydrocarbon group having 1 to 30 carbon atoms, a substituted or unsubstituted aryl group having 6 to 30 carbon atoms; M + represents a corresponding cation). |
| priorityDate |
2010-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |