| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_47cc435e1d443f13180f7766df104d9d |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-04 |
| filingDate |
2014-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da92056b8203d7120a357e25a5f6fcd4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dc38ec4fdc6e90757c118bcd289b1370
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_40ef09216e33c6cd64ab73f787f5672c |
| publicationDate |
2018-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I625381-B |
| titleOfInvention |
Etching composition and its application |
| abstract |
The present invention provides an etching composition comprising a salt containing an anion and a cation, and a solvent having a structure in which a fluorine atom and a phosphorus atom are bonded by a single bond. |
| priorityDate |
2013-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |