http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I624890-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_32e7cfbcd94f0bb4309a7945b0bb8ede |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-783 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32935 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67253 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D11-037 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D11-50 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 |
| filingDate | 2014-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_213eee1e19b425e50f5b0f65cde586b8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fba1cfa7df2f51cffade72901343f179 |
| publicationDate | 2018-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I624890-B |
| titleOfInvention | Indicator for electronic component manufacturing apparatus, and design and/or management method of the same |
| abstract | Provided is an indicator and a design and/or management method of a device using the above indicator, which can easily detect whether or not the entire substrate is uniformly processed in the electronic component manufacturing apparatus: At least one of a group consisting of pulp, ozone, ultraviolet light, and a radical-containing gas.nn n n An indicator for use in an electronic component manufacturing apparatus; characterized in that: (1) the indicator is detected by at least one selected from the group consisting of plasma, ozone, ultraviolet light, and radical-containing gas. (2) the shape of the indicator is the same as the shape of the substrate on which the electronic component manufacturing apparatus can be used; (3) the indicator includes a color-changing layer; and (4) the color-changing layer is formed of an ink composition, the ink The composition may be discolored or decolored by reacting with at least one selected from the group consisting of plasma, ozone, ultraviolet light, and radical-containing gas. |
| priorityDate | 2013-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 227.