| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0256
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0426 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-2443
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-546
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-883
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-222
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-036 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-113 |
| filingDate |
2016-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_828060b4c398422c35618586dce68beb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0956682bd5481ad9d0191edceb7d33b8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a94ddff899d9e8295505bf252ed7e966 |
| publicationDate |
2018-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I624556-B |
| titleOfInvention |
Detection element and measurement component for measuring deposition rate and method thereof |
| abstract |
A detecting element for a measuring component, the measuring component being adapted to measure a deposition rate of an evaporated material on a substrate. The detecting component includes: an oscillating crystal for detecting a deposition rate; and a barrier layer including a barrier material covering at least a portion of the oscillating crystal and assembled to prevent the evaporated material from diffusing into the oscillating crystal . |
| priorityDate |
2015-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |