| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_da1568abf4abdfb458e0e2b839d41d40 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-327
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-3365 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3171
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32174
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32412
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32623
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32422
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67213
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32357 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317 |
| filingDate |
2014-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ab63802d3bac6c74f32870605b58bbbc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2ae7be2ee41026d261cba61b3421a528
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_697767fb44544e666fdd51fddba195a0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7af0aa1e6c4c82408c40ea48715fd896
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d5fcd8eae96935b14779e6c0b191f34e |
| publicationDate |
2018-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I623016-B |
| titleOfInvention |
Plasma gun and plasma circuit assembly |
| abstract |
A plasma lance and a plasma circuit assembly, the plasma lance including an insulating block portion and a first conductive block portion and a second conductive block portion disposed on opposite sides of the insulating block portion. The conductive strip may be coupled between the first conductive block portion and the second conductive block portion. The conductive block portion and the central body portion include recesses that together form a closed loop plasma chamber. In order to inductively couple radio frequency electrical power into the closed loop plasma chamber to excite gaseous species to produce plasma, the power source is coupled to the conductive block portion. The recess in the second conductive block portion includes a constricted region, wherein the constricted region has a cross-sectional dimension that is smaller than a cross-sectional area of the closed loop plasma chamber of the portion directly adjacent to the constricted region. The constricted region may be immediately adjacent to an exit portion formed in the second electrically conductive portion. |
| priorityDate |
2013-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |