| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_88fc7f9eb617072238851d46591a0c76 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66795
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76224
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0649
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76229
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7848
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7851 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78 |
| filingDate |
2014-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f5dc7fc00622eb4be6d695571307594
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_53c4d09b41fcfb1c0fd7f84bcfe7418c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3f6a77f858fe08ed0e1737a285ea4d41
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_01d2ef17b0c84b62789b02577bc91518 |
| publicationDate |
2018-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I615976-B |
| titleOfInvention |
Fin field effect transistor and manufacturing method thereof |
| abstract |
A fin field effect transistor (FinFET) and a method of fabricating the same. A FinFET includes a substrate having an upper surface and an insulator formed on an upper surface of the substrate. The substrate has at least one recessed fin extending upward from the upper surface of the substrate. The insulator includes a lateral portion adjacent to the recessed fin and a central portion adjacent the outer side portion, wherein an upper surface of the outer side portion is higher than an upper surface of the central portion. One of the upper surfaces of the recessed fin is lower than the upper surface of the central portion. |
| priorityDate |
2014-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |