| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T156-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-85938 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B27-033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4407
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B1-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-245
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-107
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-26 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-30 |
| filingDate |
2012-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cbfb3a35814adc84640d94f5248dbe05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e44f822c764c90eefbac5b6818a611d6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_513435011e3803649bf32dc3ddb2d85a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_360e89b4cf9e6751741c6c765466fc5b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1e92301ca574daabf4879a927ae38032
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_15542243a9776bf652e2e34ea107635d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_12b4ffc7a204d72acf45794272ea1c89
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_547169be3b25e95983293ac91e361d1a |
| publicationDate |
2018-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I613714-B |
| titleOfInvention |
Method and apparatus for refreshing the surface of a gas distribution plate |
| abstract |
The embodiments described herein relate generally to methods and apparatus for refreshing a gas distribution plate assembly for use in a deposition chamber or an etch chamber. In one embodiment, a method for refreshing a gas distribution plate assembly is provided. The method includes the steps of: pushing a panel of a gas distribution plate assembly against a polishing pad of a polishing device, the panel having a plurality of gas distribution holes disposed in the panel; providing between the panel and the polishing pad Relative motion; and grinding the panel against the polishing pad. |
| priorityDate |
2011-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |