| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b8b2ec30f41266773d22a903d3f1e962 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45576
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-458
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-455 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 |
| filingDate |
2016-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7853e1ff09b92d6115ca5e5298235333
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b077ed7a23aa419b79a289cb6c857bb4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c8c1f5fa3e74c661601889c6e5ef8ca5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a98948c465b1ec18c27b3935b6591559
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e0f74eb18241693d83a0ef578545b3bc |
| publicationDate |
2018-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I612176-B |
| titleOfInvention |
Gas distribution device applied to deposition system |
| abstract |
The invention discloses a gas distribution device or an ejector in a reaction chamber, comprising a plurality of substantially parallel diffusion plates and at least one protrusion having a sloped surface and a substantially flat top surface or a sloped surface, wherein horizontally introducing at least two different reaction gases into the reaction chamber respectively The coagulation of the adduct formed by the reaction gas at low temperature is prevented by avoiding reverse diffusion. At the same time, due to the slope of the bump, the reaction gas does not show any eddy current or turbulent flow. |
| priorityDate |
2016-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |