http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I611275-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38ed56a4b4e8e2315b2b3308bffedb3f |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0337 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C69-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C69-63 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C69-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-325 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C69-62 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2015-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1db2255f20282a526feefb0abd50f7c0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_671f68f4d8b107b1b544602db4747e6e |
| publicationDate | 2018-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I611275-B |
| titleOfInvention | Photolithography developing component and method for patterning lithography |
| abstract | A method for patterning a photolithographic technique, comprising the steps of: providing a substrate; forming a layer of material over the substrate; exposing one of the layers of the material to radiation; and removing one of the layers of the material in the developer The exposed portion produces a layer of patterned material. The developer has a Log P value greater than 1.82 and contains an organic solvent. In one embodiment, the organic solvent is a n-butyl acetate derivative represented by the chemical formula CH 3 R 5 CHR 4 CHR 3 CHR 2 COOCH 2 R 1 wherein R 1 , R 2 , R 3 , R 4 , and R 5 Each is selected from the group consisting of hydrogen groups, methyl groups, ethyl groups, and fluoroalkyl groups. |
| priorityDate | 2015-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 42.