| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7684
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 |
| filingDate |
2012-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e1ae3cb947f0707edfeaff0d62ca5162
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dbf33faeb055ed4929efc03fdbb9febd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3cfe33af4ef43e81ece459ea333739e5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_09c622db2f727844b4968bcdc037ace0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d5e0f16301086bc961603ae3e21f324c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ec8b89f990eb6e9773bc2aacef892b1c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db7fb754710190ccbe1c20218e01f3cc |
| publicationDate |
2017-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I608061-B |
| titleOfInvention |
Polishing slurry and grinding method using same |
| priorityDate |
2012-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |