| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B9-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32357
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32862
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4405 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-461
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
| filingDate |
2014-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0680cbd6529ed20f88e1984ec07accca
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_437d14690895e9f410586b0516cdee8c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_52798d1405eb9fd30378c34b597661a6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c39c00bef86fa9981d10fbafeff8bd22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fdbcf172381e05d434a67ea3578713fd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_96056afea4ebb9762bfa12db4af32e72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_84922a1b9b7ed3a4d9c896e2834e4df7 |
| publicationDate |
2017-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I600786-B |
| titleOfInvention |
Cobalt removal for chamber cleaning or pre-cleaning processes |
| priorityDate |
2013-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |