| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76879
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2855
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76865
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76843
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76877
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76873 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-54 |
| filingDate |
2013-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e3a8daa417b8c160871567ce2f4dd5f7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a9d92b2c7b3c92f8f9da3c448b343dd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9d1d6ec39ef05d947c403be45bfb9aa1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_846aba2cabe017623dc956b3dcff5d4b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5488b975fd972d707d399b2d0a31a583 |
| publicationDate |
2017-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I600785-B |
| titleOfInvention |
Method and device for synchronizing deposition process |
| priorityDate |
2012-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |