| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-18 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-094
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0752
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0332
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02129
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31138
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31122 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 |
| filingDate |
2016-02-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_645bc4a6342abd2d9bce7082854f2dfb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fd7bd1ca7aa94cb6ea68287e139e831b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a051dfef0ceeff1b7af954be9f79c704
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_83de68a158a2dc04d639c8a225fe35f4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0ce71c4bba5334d1288aea620ba11360
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_04f3def1feece55e798157b5bbe61d38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f63ebafc80cc2a2b4209bb414f904d05 |
| publicationDate |
2017-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I596434-B |
| titleOfInvention |
Pattern forming method |
| priorityDate |
2015-03-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |