| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ce9a12ee76a1e7a0b902ff1fe2012479 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D7-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D21-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-001
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D21-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25B9-19
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-04 |
| filingDate |
2014-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c5ee783ed4e6105913c94f495a35c8aa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_72034c34bf9781847d7e0a4610fbe019
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c4bee98131eb1a539581174fb136c19e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e2f81b6d10fbc8992e2a0077412bfcd7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e5328245f268f17e8487f4c67eaf033a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_527e5ed7d2fc364668936d53a4c83f22 |
| publicationDate |
2017-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I595107-B |
| titleOfInvention |
Electrochemical deposition equipment and method for controlling the chemicals therein |
| priorityDate |
2013-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |