| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_33c922e05f6133b7d72dbb849d77487d |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-3064
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-425 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42 |
| filingDate |
2015-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0bf5b5b4d1612b9a24b15c832947b392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_826f95d708d8e9625d72e0b14c37a847
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c3d83bf6e5063975b88f29e88e5fe2f2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a6607739177ed2e853a10933374852a8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_167d131a8454fb4ab9f1f33afe2351c6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c47c04d5f935a41ca926f4cd2419aed4 |
| publicationDate |
2017-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I584085-B |
| titleOfInvention |
Photoresist removal device and photoresist removal method using same |
| priorityDate |
2014-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |