| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e79c7785ed9b1eff8a47b93114f35c27
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c85d78c6a4459b5dbbc49c82a4c5c107
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-322
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-325
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2015-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a1aed123872201f336519a662f19e5b3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bdc5a874c4270247e9a871ab60e41e82
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef2e0d05b8eef246f637a1ec09febc69
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_937d73c1ea81bbfbcfae0e0fbe16725b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_45e329f981ef30860a96372105835b0a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_23aece0ef1a61a10cb69805de13decdd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f414f48a448ff0873e508cf58147d5d1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_06fe2c1add8df0dfc617d62c358a70c7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6274b9f96af10da66aef822f24497168 |
| publicationDate |
2017-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I584061-B |
| titleOfInvention |
Method of forming multiple patterns |
| priorityDate |
2014-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |