| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0c468e687b43595cae7cb1c2667678f1 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0432
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31774
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0435
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31771 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3174
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3177
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-243 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate |
2013-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c3806fe639344ce7db67b15a915ec89b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6d4007d15a92be8ab1b4b7773dc281f1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cb4a835d2cc52ebbc83ba4af7c217127
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8521037af84ee1f6ec67ddecde81876d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dec2ab5fc0f8611ed4720a8a1aa6c65a |
| publicationDate |
2017-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I582546-B |
| titleOfInvention |
Multi - charged particle beam rendering method and multi - charged particle beam rendering device |
| priorityDate |
2012-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |