| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2013-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_df899713455e8af99dc2d2b739499fc8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7ac66d674795b7f122d7bd6ec0674a3e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_89abab811069c64e02454132b3ab9bc4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cfcbea7b62c2c8449da55d2cca7dd61c |
| publicationDate |
2017-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I575325-B |
| titleOfInvention |
A method for forming a resist film and a pattern forming method |
| priorityDate |
2013-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |