| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_708c6fc3399004e7763740f50c5fe635 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-568
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B65G49-061
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67706
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B65G17-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67736 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-677 |
| filingDate |
2010-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0921fd09bf5176e66bc400919c7f988c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b6f1d8345d706755cb44f916de4b35bd |
| publicationDate |
2016-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I553766-B |
| titleOfInvention |
Conveyor assembly for vapor deposition apparatus |
| priorityDate |
2009-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |