| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-511
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45578
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32192
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-545
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-345
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3222 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 |
| filingDate |
2011-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5eaf98294fca9b1a4f22cfe647b54b9f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_620122497948d2d5067e767333092382
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4eee14016755ed38cedb16939694a43e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5d2c0a1eaeb6deb2c3e3bf6c78751812
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ce205d343c97f4282e68b95e76f7aa58
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8979e1167cf011bd90acabb3983adec4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7a4d501e3b25a5848543612278da55c9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6c6dad123aba30d3089cece6ba62ba0d |
| publicationDate |
2016-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I553146-B |
| titleOfInvention |
Film deposition using microwave plasma |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I802410-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11618949-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I767403-B |
| priorityDate |
2010-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |