| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b7886f9841c03e2449d28f454ebbe1dc |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02063
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02071
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0041 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F11-10 |
| filingDate |
2011-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dd1d52c8e467e0b645106c02938cd4fc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a4cfd0f8a807ec481d9986a36c2c54af
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_de3dac31b80c73d6d299664209b059cb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_25ddb2110235926cd7292ef07e48a0c1 |
| publicationDate |
2016-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I548738-B |
| titleOfInvention |
Aqueous cleaner for removing post-etch residues |
| priorityDate |
2010-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |