| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b43df28f012b376838b0fb63dd2fddfc |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02417
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1204
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02557
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02568
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02628
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1245
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02411
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1828 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C335-08 |
| filingDate |
2011-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_08662c4a699b823123852d78c84d0d95
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7c757cca84f640b3d81a8650be4c9dbf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c1dc1eab42a95173c32d83e86f153d5d |
| publicationDate |
2016-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I546412-B |
| titleOfInvention |
Metal sulfide deposition using alkylated thiourea |
| priorityDate |
2010-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |