Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6f932d94618d9b875e401457b33e9761 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-50 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-02363 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
filingDate |
2011-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2016-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f4422669afde35c1f7c8c15e74f687ac http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6ed2272941ce130e5d140ddf5a0da35a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6c45f3a4f18c66b8bd65ccb7152d0717 |
publicationDate |
2016-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
TW-I542664-B |
titleOfInvention |
Texture etching solution composition and texture etching method of crystalline germanium wafer |
priorityDate |
2010-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |