| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f517051dd4d265e5e931724f45b34ddc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c63bc5ef3ae590b0603de4587961cac3 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-861
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B43-27
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66136 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66666
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B41-27 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-06 |
| filingDate |
2012-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cc7cf8971aacaa1683f45b43b7a3e50c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1faf0a301870f552313b21599b0a4faf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f3b5d9a959e54d315aa4960fe9cae82
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_092e53fb079d79dc0c283219e9d8026c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_28efde39136dd20b076bd1467e826a6d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_efb57ebec5e9cd1c3dbc9badae477a18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_afd619a4e4d37f251c5c201e3dd39f28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e50692672a02e305c945a0c2cbaef4a0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_259b1104b7bf3c7e3e9195acdddb52f6 |
| publicationDate |
2016-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I541328-B |
| titleOfInvention |
Etching composition and method of manufacturing semiconductor device using same |
| priorityDate |
2011-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |