| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6e3134a8c086008af6ff6aa6020dd74a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B2201-64 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B13-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-40 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-515
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 |
| filingDate |
2010-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_21dd83979d759727b3d0aadbb611ddf0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a57857621964d1c435953dd98a2e88b6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_be0445435720786d860b0b2994d14a84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c6cd0af04a0fca3d5ebc1738a3ba625e |
| publicationDate |
2016-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I540221-B |
| titleOfInvention |
System and method for depositing metal oxide thin films using excited nitrogen-oxygen species |
| priorityDate |
2009-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |