| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8e0bf0928b608797b70bbc2b91c7e52e |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-18 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate |
2011-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a94e945a56a29bb7ae1a3d2d89e0ae42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a6424e635caf64c9b84dc18cbd487e99
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7ff36f4ab028fee9f951006d403f8815
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a9e35d1c7eac43161e7c869e679ed7bf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e5ad8cccd5c57dcd6928fd2f98e6e9bb |
| publicationDate |
2016-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I538989-B |
| titleOfInvention |
Water polishing composition and method for chemical mechanical polishing of electronic, mechanical and optical device substrates |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I765140-B |
| priorityDate |
2010-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |