| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-0085
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76849
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76861
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02068
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-3209 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-30 |
| filingDate |
2008-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cceb5b151eaa5eb966d4e3a0fb562c67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cee3ea16eab0a0c1fcf70cfa6b6295bd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4d4b35310c8ce5cfb0e1e30a8f40e493
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c24579bfc7ccac52b15c48b8fa6eb0c |
| publicationDate |
2016-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I528426-B |
| titleOfInvention |
Post-deposition cleaning method and formulation of substrate with cover layer |
| priorityDate |
2007-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |