| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6e8683cde95e36ce68d18801b59bfbd4 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30655
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-68327 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30621
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68771
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6833
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68735
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6836
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32623
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67092
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2014-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a4337f706e1beb017cf3404b087acc67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_279fedc5092bb682031f3e89c55b83f6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a25bc2855c84ba9606272ffb637c2c0d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c021b46528ed30efd8dd1b89ae27db2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4984e516ae05f79436f939e29903b27e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b98d61e38a4b9ae3fccc5404ac4a817f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e6cafbf60ee8145769e6248f112605aa |
| publicationDate |
2016-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I527108-B |
| titleOfInvention |
Method and apparatus for plasma cutting semiconductor wafers into small pieces |
| priorityDate |
2013-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |