| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_47cc435e1d443f13180f7766df104d9d |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76819
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7684 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2008-07-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e0ec5072a8a8361337d469d41367b408
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ff37d7ae5f5a9b8fb3f1085678217500
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db40fca061e5d0de74e48225a8b62379
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5d0070f5a9361d40dac292c0045992ea
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d63cfce9636dcc04e12e15ea9b71f1a9 |
| publicationDate |
2016-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I525680-B |
| titleOfInvention |
Honing fluid for metal film and honing method |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I772679-B |
| priorityDate |
2007-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |