| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9aefccdf30f6882014a34139785bc641 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-50 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-042 |
| filingDate |
2011-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8c28b0c0dd9b7203a14f33dea0f59159
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bec6dc1135790452b25b259fddede4b1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a434539809af36bfc726be20e44b9ef8 |
| publicationDate |
2016-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I523089-B |
| titleOfInvention |
Technique for forming an oxide layer on a flat conductive surface |
| priorityDate |
2011-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |