| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1a492183be65153abfa7dec00d51c816 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2257
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2236
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7827
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66666
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66575
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-306 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324 |
| filingDate |
2010-05-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d23e040f92f2240c865fc20df5b6f5f5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ec168dd5926e7b070cb95b0c1a7ef360
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_23c4306241e5491e892c01b1957cca25
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a174ba9c74b18d43c6803a6eba51b5f0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa90153b76c99de554626b1e3b7d7e90 |
| publicationDate |
2016-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I520180-B |
| titleOfInvention |
Plasma doping method and method of manufacturing the same using the same |
| priorityDate |
2010-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |