| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e4c608a8531ea588aab7e23318e09a77 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42 |
| filingDate |
2007-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f1575ce59e10aa52881a0d7af5d3195
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_53af2eb49c29cfeb66450fa31ad3f40f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_891fc2c98638ea1bad069b120cad22f6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a4acfcecabcda8f43bd922246332b27f |
| publicationDate |
2016-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I519909-B |
| titleOfInvention |
Low etching photoresist cleaning agent and cleaning method thereof |
| priorityDate |
2007-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |