| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_069a92549123806a5d654dc036a676e9 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-136254
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2482
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14601
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-146
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-15
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2817 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-226
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-29
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate |
2006-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf18a6ab5311f5fd215f34b6c2143886
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf13b53d1d63d519fa3bdbcd284c76fa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6f9318ed995a48f5baf8e3d78b752556
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e67d0a81c1e378e9a21a3840d080848f |
| publicationDate |
2016-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I519779-B |
| titleOfInvention |
Electron beam device |
| priorityDate |
2005-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |