http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I519620-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b0120933550ea729b9f3186c3772531b |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J7-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2010-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1dc096b996e94a01476267fba5bb7395 |
| publicationDate | 2016-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I519620-B |
| titleOfInvention | A wafer for processing a wafer, and a method for manufacturing a semiconductor device using a wafer processing wafer |
| priorityDate | 2010-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 65.