http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I510676-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_15bd6a1febacd9542fb1af4a1d3a32e2 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-18 |
| filingDate | 2013-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2015-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2015-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I510676-B |
| titleOfInvention | Metal etchant compositions for etching copper and molybdenum and their use for etching Metal etching method for copper and molybdenum |
| priorityDate | 2013-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 76.