http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I506696-B

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ed62b7551998e54b35784cdbbb2778d5
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02271
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45531
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0217
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02167
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02211
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67109
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-314
filingDate 2013-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2015-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c745cc5d8b5cba025d944e864981d9f4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_11276cd7b630770ff1eab498eaf58569
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3cd060bc4a3d9ce9aba67e94c46a132b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aaf9a89c75f7e55fe1f74460be886d6e
publicationDate 2015-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-I506696-B
titleOfInvention A manufacturing method of a semiconductor device, a substrate processing device, and a recording medium
priorityDate 2012-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004186649-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002142533-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007324536-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009240017-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009286402-A1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420617338
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25135
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419546203
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559585
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524000
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415712843
http://rdf.ncbi.nlm.nih.gov/pubchem/anatomy/ANATOMYID162890
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19977609
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID43369
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9812778
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID432477
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559581
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID42608478
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556970
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419527240
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6558
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13848
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454040570
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512948
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414875081
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419516768
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID413336564
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419513585
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420223717
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID29062
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450347612
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6948
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415777190
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419517759
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123279
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24556
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25953
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8831
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID90560
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID94359
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419517952
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID947
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4092293
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426098976
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61924
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID455667478
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419549336
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID222
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415806325
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18780011
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID37715
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559546
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559367
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559366
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82216
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID101089385
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123195
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419593302
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520552
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID117627
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID297
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419521076
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID167109
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415818016
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24817
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419536865
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID447474366
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419491223
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419518999
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5826
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419517548
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410492264
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8902
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID83497
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5462311
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415788807
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1322
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453944914
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6327210
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10313039
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8085
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6327614
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14222
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419691961
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6326
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449654217
http://rdf.ncbi.nlm.nih.gov/pubchem/taxonomy/TAXID162890
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419593449
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410495913
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448078973
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3033151
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419579030
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18359705
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6431
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414865500
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6061
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419549759
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID101175
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9541
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6214
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451237050
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426015070
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450553823
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415964938
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5976
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419499693

Total number of triples: 133.