| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_eb500c42e915e25af5d03f897f310be2 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-513 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-513 |
| filingDate |
2010-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2894a1b3dbe4cf3915a5e7720b83d0de
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dddc2dbf0c0a96a7877cd91b58ff6e6b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8d332383b08980759e6ca4b4b2212587 |
| publicationDate |
2015-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I504778-B |
| titleOfInvention |
Apparatus and method for depositing thin film |
| priorityDate |
2009-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |