| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6708
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02087
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68792
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0209
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68785 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| filingDate |
2011-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b8471b07030b314a1ceb52417357c0ee
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e8c783b16b86542476b0b0e7656951a3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_43cdbe9922b415b0731ba1c80f5bb010
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2ae27860c71559d83bcc45f7d3b66dd2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e645e9c6371967391f0a269a66fa1f84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ad1c65265fdc9d197acaf21558567fc4 |
| publicationDate |
2015-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I502639-B |
| titleOfInvention |
Liquid processing method and recording medium and liquid processing apparatus recorded with a program for carrying out the liquid processing method |
| priorityDate |
2010-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |