| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_781c429e4e20536916ff74dcbe1b5417 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C22C19-03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C22C5-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3414
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0682 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 |
| filingDate |
2011-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4b511ed4582bfcdc2cd994fc07b1d23f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9074254ce9744053589c7662db089c65 |
| publicationDate |
2015-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I502092-B |
| titleOfInvention |
Nickel alloy sputtering target, Ni alloy film and silicon nitride film |
| priorityDate |
2010-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |