| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_900efd82417bba0fbbf6a7f731ef08f8 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-724
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-662
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-787
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-725
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-785
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-663 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-645
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3426
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-081
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3414 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 |
| filingDate |
2012-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7ddd7d618a1d61df895d31dcc898d2c9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f9faac2664480125f5e17b2aff901dee
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ce1b22b2aaba5bbae86ac88dc68a648c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a4782b696c6b486f275f9c3e3c2ea55
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e4772b677505d075ee6a6a09928a7db3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9e6e09abbcb0043a30536a461540de8b |
| publicationDate |
2015-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I498438-B |
| titleOfInvention |
Sputtering target and its manufacturing method |
| priorityDate |
2011-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |