| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b7886f9841c03e2449d28f454ebbe1dc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31133
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-423 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-08 |
| filingDate |
2009-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_034521d38da2ba585803be91d73d81f5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_55a17be34482cde406f74b45dc5f5fc1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_08470dc41067fb630adb21da0427de4e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_72a0a75f49b822f208161121417ba5b1 |
| publicationDate |
2015-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I494710-B |
| titleOfInvention |
Low pH mixture for removing high density doped photoresist |
| priorityDate |
2008-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |