| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6e3134a8c086008af6ff6aa6020dd74a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28562
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76843 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28088
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45527
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4966
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-40114 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-283 |
| filingDate |
2009-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e15dedf6031eeac34d36ccec2d45204f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_125f3925fc64e43be357c2ea8fabd68c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5732c83749ebaa37b0938982befd1965
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7af9d8f190a133218d25c2f1cc268196 |
| publicationDate |
2015-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I488990-B |
| titleOfInvention |
Atomic layer deposition of a metal carbide film using an aluminum hydrocarbon compound |
| priorityDate |
2008-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |