| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32633 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32651 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate |
2012-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3f60d02deaa1a229ed80debb05d854ed
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_208fd14dacbaa5877fc94a08898e80b7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef30c14bdb1b137d04663296b4f756d0 |
| publicationDate |
2015-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I488213-B |
| titleOfInvention |
Faraday screen and plasma processing chamber using the Faraday screen |
| priorityDate |
2011-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |