| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_44ff3005508304394801e265e503b811 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-29
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-26 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-36 |
| filingDate |
2012-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b82192c6ec4bd1e0336a3d612e2de7e |
| publicationDate |
2015-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I480679-B |
| titleOfInvention |
Multi-gray mask, manufacturing method of multi-gray mask, pattern transfer method, and manufacturing method of thin film transistor |
| priorityDate |
2011-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |