Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8fb9f44db08d1c42a53f3d28eaae416f |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02074 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D1-146 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-37 |
filingDate |
2009-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2015-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c69a6ce985e23cbdc540257c033656ec |
publicationDate |
2015-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
TW-I468510-B |
titleOfInvention |
Cleaning liquid for substrate for semiconductor device |
priorityDate |
2008-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |