| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6719
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0021
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67051
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67028
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67034
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02101
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-302 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2011-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8541687be6a795047f8d6cf8bc353916
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_47d4ea411543095c3f1598e6f36cd735
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4b5c7c86683b258065edfcd36a630082
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5de0f8583c713f724b1ac0db2f06a0f3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5c577d5b5e252c9ed30b5bb677d25054 |
| publicationDate |
2015-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I467646-B |
| titleOfInvention |
Supercritical processing device and supercritical treatment method |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11621174-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I758758-B |
| priorityDate |
2010-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |