| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fdad00677b9268c26e005a9e03a7b9dd |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0149 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3086
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00031
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-165
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-26 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C71-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J7-04 |
| filingDate |
2012-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7c467dfb65cd2f90a09772c5d1b6fa6f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9a9ff80dfc1746d3bc3d722994e0b332
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4dedb0ce5806e1170ccc93fbbcffd5ea
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_545b92b6d8f99a7070c6e0078dd4bf16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4bdee699d96792609bf442c596e57149
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5abf4d4aa032342cfc20e3a508db8631
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0ebf619a7f652b2ca3284458d275384d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_84b3a02d2a7a3335ccccd970288fdde8 |
| publicationDate |
2014-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I464544-B |
| titleOfInvention |
Pattern formation method |
| priorityDate |
2011-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |