| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f7a85d730847339e0c2e621c6c6fd96e |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-06 |
| filingDate |
2008-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2a2efcdcd695024fb1a6e1ac962f7e27
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3916af740e51beb6ead0fd96357ca64f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8516c8516756c4f788bd9ba6ee44a22b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db2f647e31dd7476252641f1fb0343be
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_853c5e678449d2306f3fe497a044823c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_55e141246e789d4e4f0d0a526d200fa8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a9ff9ca2c7f0ee4c0324700eb3b9bde5 |
| publicationDate |
2014-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I464290-B |
| titleOfInvention |
Method for preparing thin film by atomic layer deposition using cerium-containing and zirconium-containing precursors |
| priorityDate |
2007-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |